Integration and characterization of solid wall electrodes in microfluidic devices fabricated in a single photolithography step
نویسندگان
چکیده
We describe the fabrication and characterization of solid 3-dimensional electrodes in direct contact with microfluidic channels, implemented using a single photolithography step, allowing operation in high-dielectric constant media. Incorporation and self-alignment of electrodes is achieved by combining microsolidic approaches with exploitation of the surface tension of low melting point alloys. Thus the metal forms the walls flanking the channel. We show that this approach yields electrodes with a well-defined, reproducible morphology and stable electronic properties when in contact with biochemical buffers. By combining calibration of the electric field with free-flow electrophoresis we quantify the net solvated charges of small molecules.
منابع مشابه
Low cost integration of 3D-electrodes via replica molding
We demonstrate a new replica molding method for integrating 3D-composite electrodes into microfluidic devices made from polydimehtylsiloxane (PDMS) at low cost. Our process does not require work in a cleanroom, expensive materials, or expensive equipment once a micro mold has been fabricated using standard multilayer SU-8 photolithography. Different device geometries have been fabricated to dem...
متن کاملAll-carbon electronic devices fabricated by directly grown single-walled carbon nanotubes on reduced graphene oxide electrodes.
Being free from the harsh post-growth treatments in strong acids, long time sonication, etc., directly grown single-walled carbon nanotubes (SWCNTs) preserve their pristine structures and intrinsic properties, which make them ideal for highperformance electronic devices. [ 1–9 ] Integration of directly grown SWCNTs into such addressable devices is a crucial step and requirement for both fundame...
متن کاملDigital Counting of Bacteria by Using a Microfluidic Chip with Built-in Electrodes
We present a microfluidic chip embedded with gold electrodes for digital counting of bacteria. Microfluidic chip is fabricated to detect single Escherichia coli flowing in a channel which size is comparable to the bacteria. The chip is fabricated by photolithography, dry etching, e-beam evaporation, lift-off process, and focused ion beam (FIB) milling process. We could detect the trace of the i...
متن کاملScreen printing of solder resist as master substrates for fabrication of multi-level microfluidic channels and flask-shaped microstructures for cell-based applications.
Although silicon technology can be adopted for the fabrication of microfluidic devices with high precision, the capital and operating costs for such technology is often prohibitively expensive. In recent years, many alternative methods have been advocated to reduce the cost of microfabrication but often with reduced qualities in many important features, such as channel resolution, surface smoot...
متن کاملPrototyping of microfluidic devices in poly(dimethylsiloxane) using solid-object printing.
A solid-object printer was used to produce masters for the fabrication of microfluidic devices in poly(dimethylsiloxane) (PDMS). The printer provides an alternative to photolithography for applications where features of > 250 microm are needed. Solid-object printing is capable of delivering objects that have dimensions as large as 250 x 190 x 200 mm (x, y, z) with feature sizes that can range f...
متن کامل